发明名称 SMALL PART LAMINATING DEVICE AND LAMINATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a small part laminating device and laminating method, which laminate at a high reliability without breaking a small part or an incomplete lamination. SOLUTION: Prior to laminating a first small part 11 and a second small part 12 via a joining member 13, the cured state of the joining member 13 at lamination is predicted from the temperature of the first small part 11 measured by a temperature probe 21. And, a temperature controller 22 controls a temperature of a heater 3 at actual lamination according to this predicted result. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005333005(A) 申请公布日期 2005.12.02
申请号 JP20040150535 申请日期 2004.05.20
申请人 OLYMPUS CORP 发明人 NAKAMURA MIKIO;KUBOI TORU
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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