| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature controller and a device fabrication apparatus with the controller that can perform temperature control with high accuracy. <P>SOLUTION: The controller comprises a main heater and space heater, a temperature sensor for measuring temperature of fluid heated by the heater, a temperature compensator for calculating an output instruction value to the heater by entering a thermometry signal, a first power supply means for supplying AC power to the main heater, a second power supply means for supplying DC power supply voltage proportional to the output command to the space heater, a heater output detector for measuring electric power supplied to the main heater, an output detection signal which is measured by the heater output detector, an error correction means for calculating error with an output command value that is output from the temperature compensator which is used as the output command value of the space heater, and an error detector for detecting error between the main heater supply power and the output command value which is output as the output command value of the space heater. The controller outputs the error between the supply power to the main heater and the output command value as the output command value of the space heater. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
