| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve stable formation and recovery of a cryo-target layer to be irradiated with convergent pulsed laser light and to thereby achieve stable generation of pulsed X-rays. <P>SOLUTION: A crystal fixing groove 85 in which a target material supplied from a target gas supply port 4 is to be deposited is provided at a location to be irradiated with convergent pulsed laser light in a rotary drum part 8 that moves in a rotating direction and an axial direction, so that a falling-off of the target material due to impact of the laser irradiation, for example, is prevented. On an inner surface of the cryogenic cover 5, orifices 86, 87 are formed on both sides with the crystal fixing groove 85 located in between, and sharp-pointed annular projections 89, 90 are provided to allow a space 88 between the orifices 86, 87 to serve as a gas sealing part. The space 88 is divided into a plurality of spaces with a partition 91, and the target gas supply port 4 is provided in each of the spaces to supply the target gas evenly. It is thus possible to keep the target gas in high density and to thereby recover the cryo-target layer stably. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
