| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for bonding quartz glass without using a resin-made adhesive. SOLUTION: This method for bonding quartz glass plates 10 and 12 comprises forming thin films 11 and 13 on the surfaces of the two quartz glass plates 10 and 12, respectively with a material having a lower softening point than the quartz glass plate, superimposing the quartz glass plates 10 and 12 so that the thin films 11 and 13 oppose each other, and treating them by annealing at a temperature in the vicinity of the softening point of the thin film. COPYRIGHT: (C)2006,JPO&NCIPI |
