| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier member having a cleaning function which permits convenient and reliable removal of foreign matter adhered to the inside of substrate-processing equipment without contamination of the equipment when the member is carried into the equipment. SOLUTION: Forming a carrying member with a cleaning function having a cleaning layer on the member, the method comprises protecting the back surface of the member preliminarily with a protective material, forming a cleaning layer on the principal surface of the member with the back surface as protected and cleaning the back surface to reduce the level of contaminants, e.g. particles, metal impurities and silicone impurities, so as to obtain a low-contamination carrier member having a cleaning function. The cleaning of the back surface comprises a process of removing a part or the whole of the protective material or a process of cleaning with the protective material left on the member. COPYRIGHT: (C)2006,JPO&NCIPI
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