| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming apparatus in which the control accuracy of film thickness is better than that in the conventional art in the film forming apparatus for forming the film of a viscous material having a prescribed film thickness and slope on the surface of a transfer pan. SOLUTION: A plurality of displacement sensors S1, S2, S3 are attached to a bracket 10 to fix the position so as to measure the film thickness in a plurality of points each having different film surface of the viscous material formed on the surface of the transfer pan 2 and the attitude of a blade 3 is controlled by a film thickness control part 6 to bring the film thickness close to a required value on the basis of the measured values of a plurality of the displacement sensors S1, S2, S3. COPYRIGHT: (C)2006,JPO&NCIPI
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