| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shearing interferometer with dynamic pupil fill which dissolves one or more faults in conventional technology. <P>SOLUTION: The shearing interferometer comprises : a source of electromagnetic radiation ; an illumination system which delivers the electromagnetic radiation toward a surface of an object ; an object in an objective plane, which generates a diffraction pattern ; a projection optical system which projects an image of the object on an inner area of an image plane and a detector which receives an interference fringe pattern from the image plane, wherein the interferometer is so constituted that the diffraction pattern is scanned across the pupil of the projection optical system. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
