DEVICE AND METHOD FOR DETECTING POSITION, DEVICE AND METHOD FOR ADJUSTING POSITION, AND DEVICE AND METHOD FOR EXPOSING

摘要

PROBLEM TO BE SOLVED: To accurately detect the position information of a nearly disc-like body.

SOLUTION: The edge position of a wafer W during a turn table rotation is detected by line sensors 21, 22 by rotating the wafer W held on a turn table TT by 270°. The detection results are let be D1[i], D2[i]. The information about the whole perimeter contour of the wafer W can be detected even if the rotation amount of the rotation axis of the turn table TT is 270°, which is smaller than 360°. The wafer W position information is detected in a short time and with a high precision.

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