ELECTRON-EMITTING ELEMENT, ELECTRON SOURCE, IMAGE DISPLAY APPARATUS, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an electron-emitting element showing a stable electron emission characteristic and having excellent durability.

SOLUTION: This electron-emitting element is so composed that element electrodes 2 and 3 and then a conductive thin film 4 for connecting the element electrodes 2 and 3 to each other are formed on a substrate 1; thereafter a voltage is applied between the element electrodes 2 and 3 to form an electron-emitting element 7; and then a bipolar voltage pulse is applied between the element electrodes 2 and 3 in an atmosphere containing a carbon compound gas to deposit a carbon film 5 containing carbon as a main constituent on the conductive thin film 4. The bipolar voltage pulse is an asymmetrical voltage pulse satisfying a predetermined relationship with the polarity of the voltage pulse in driving; the formed carbon film 5 is asymmetrical; and the substrate 1 has a groove 6.

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