| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device capable of uniformly adsorbing and fixing an object to be treated when plasma treatment is carried out, and capable of applying uniform plasma treatment to the object to be treated without causing abnormal arcing between a solid dielectric member and electrodes facing each other eve if a high voltage is impressed. <P>SOLUTION: This plasma treatment device has a pair of the electrodes facing each other, the porous solid dielectric member installed on at least one facing surface of the electrode, and an adsorbing means to adsorb and fix an object to be treated to the porous solid dielectric member by sucking the porous solid dielectric member. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
