| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetometric sensor capable of highly sensitively detecting magnetism through the use of a magnetostrictive material. SOLUTION: The magnetometric sensor is provided with both a frame part 11 having a rectangular frame shape and a sensor substrate 1 having a thin-wall part 12 formed more thinly than the frame part 11 is, surrounded with the frame part 11, and supported at the frame part 11. The upper surface of the thin-wall part 12 is provided with piezoresistors R1-R4 as a distortion gauge, and a magnetostrictive film 2 made of a magnetostrictive material is superposed on the upper surface of the thin-wall part 12. The lower surface of the thin-wall part 12 is provided with a magnetic focusing film 3 made of a magnetic material. Since the piezoresistors R1-R4 detect distortion generated in the thin-wall part 12 by the magnetostrictive film 2 at the reception of magnetism, it is possible to detect magnetism. Since magnetism is focused onto the magnetostrictive film 2 by the magnetic focusing film 3, it is possible to improve sensitivity in comparison with the case that the magnetic focusing film 3 is not provided. COPYRIGHT: (C)2006,JPO&NCIPI
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