| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for efficiently recovering silicon incorporated in used slurry as a halosilane. SOLUTION: The method for producing the halosilane includes (1) a step for recovering a solid portion 3b containing abrasive grains as a main component by subjecting the used slurry 1 formed by mixing of silicon grains into slurry comprising the abrasive grains and a water-soluble dispersion medium to a primary centrifugal separation, (2) a step for separating a liquid portion 3a obtained by the primary centrifugal separation into the liquid portion 5a mainly comprising the dispersion medium and remaining sludge 5b by subjecting the liquid portion 3a to a secondary centrifugal separation, (3) a step for distilling the liquid portion 5a, obtained by the secondary centrifugal separation, so as to obtain a solid portion 7b, then pulverizing the solid portion 7b, and removing an organic residue, and (4) a step for reacting the obtained solid portion with a halogenation agent and rectifying a product obtained by the reaction. COPYRIGHT: (C)2006,JPO&NCIPI
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