| 摘要 |
PROBLEM TO BE SOLVED: To enable to evaluate a damage of a subsurface of an optical element with a nondestructive method. SOLUTION: A nondestructive process for an evaluation of the subsurface damage of the optical element comprises to measure a reflection light intensity by focusing a microscope onto a point of the optical element. At one embodiment, a laser beam is focused on a measuring point on the optical element by the microscope, the microscope gathers the reflection light or the scattered light from the damage of the optical element. A position and a severity of the subsurface damage are obtained by analyzing a data giving the reflection intensity for a point of a three-dimensional array within the optical element. COPYRIGHT: (C)2006,JPO&NCIPI
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