| 摘要 |
PROBLEM TO BE SOLVED: To provide the forming method of a temperature conversion function by which a heat treatment temperature at which a processed material is exposed in a heat treatment process after heat treatment, and temperature distribution is obtained with higher accuracy. SOLUTION: In the forming method of the temperature conversion function to obtain the temperature at which the processed material for a monitor is exposed, from a sheet resistance value before and after the heat treatment of the processed material 5M for the monitor with a metal-containing film formed on its surface, the forming method includes a process to prepare a plurality of sheets of the processed material for the monitor, a process to measure the sheet resistance of the metal-containing film before the treatment, a process to apply the heat treatment to a plurality of the processed materials for the monitor, a process to measure the sheet resistance of the metal-containing film of the processed materials for the monitor after the heat treatment, a calculating process to obtain a finite difference value of the sheet resistance value before and after the heat treatment, a process to obtain a standard finite difference value compensating a quantity of the sheet resistance value in which the sheet resistance value before the heat treatment makes an impact on the sheet resistance value after the heat treatment for the finite difference value, a calculating process to obtain the compensated finite difference value at each heat treatment temperature averaging the standard finite difference value, and a process to obtain the temperature conversion function which is correlation between the temperature in the heat treatment process and the compensated finite difference value, based on the compensated finite difference value. COPYRIGHT: (C)2006,JPO&NCIPI
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