| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem in which a conventional electrical fine machine device (MEMS) type actuator needs to have a larger driving arm when having a larger driving area, which causes upsizing. SOLUTION: A driving arm 4 which constitutes an actuator 1 is made wider at its middle part than at both the ends, and driving electrodes 6 are provided at both ends of the driving arm 4. Consequently, an area for the driving electrodes 6 imparting a driving force is secured and the driving arm 4 is more flexible and bendable to expand a driving area. COPYRIGHT: (C)2006,JPO&NCIPI
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