| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the effect due to reaction force of driving force. SOLUTION: A stage device 10 includes: a stationary base 14 fixed to a base 12; a substrate table 16 supported on the stationary base 14; a movable stage 18 transversely constructed so as to straddle the substrate table 16; a pair of linear motors 20A and 20B for driving both the end parts of the movable stage 18 with respect to the Y-direction; and a controller 23 for translationally driving the linear motors 20A and 20B. Slide mechanisms 35A and 35B are provided between the stationary base 14 and the lower ends of strut parts 34A2 and 34B2 of motor support parts 34A and 34B. When the linear motors 20A and 20B drive the movable stage 18 with respect to the Y-direction, the motor support parts 34A and 34B are moved with respect to the direction opposite to the traveling direction of the movable stage 18. Accordingly, there is no effect of the reaction force from the linear motors 20A and 20B, and the driving control of the movable stage 18 can be performed at high accuracy. COPYRIGHT: (C)2006,JPO&NCIPI |
