| 摘要 |
PROBLEM TO BE SOLVED: To achieve frequency stability with high accuracy and high frequency accuracy at a mass production level in manufacturing an SAW (surface acoustic wave) device such as an SAW oscillator. SOLUTION: To manufacture the SAW oscillator having desired operating frequency f0 and frequency stability±appm, frequency variation width (ppm) that can occur after package sealing is predicted as +b1 and -b2 and frequency stability (ppm) is set to +(a-b1) and -(a-b2) in a process for performing frequency adjustment by etching the surface of a piezoelectric substrate of an SAW chip mounted on the base of the package. In an orthogonal coordinates system where a horizontal axis x is frequency deviation to the operating frequency f0 and a vertical axis y is frequency variation width within a prescribed operating temperature range, the frequency of a target value is determined to perform frequency adjustment so as to place frequency deviationΔf0 about frequency variation widthΔfT of the SAW oscillator within -(a-b2)≤x≤(a-b1) and 0≤y≤x+(a-b2) and so as to preferably satisfy a straight line y=2x-(b2-b1). COPYRIGHT: (C)2006,JPO&NCIPI
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