FILTER INCORPORATING INDUCTOR, DUPLEXER AND ITS MANUFACTURING PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a small filter employing an air gap type film bulk acoustic resonator which can be manufactured through a simple process.

SOLUTION: The filter comprises a substrate having a first port, a second port and a ground port for electrical connection with external terminal formed on the upper surface, at least one first film bulk acoustic resonator formed on the surface of the substrate and connecting the first and second ports in series, at least one second film bulk acoustic resonator being connected in parallel with a coupling node formed between the first and second ports, and at least one inductor for connecting the second film bulk acoustic resonator and the ground port in series.

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