AIR-TIGHTENING METHOD OF SUPERHIGH VACUUM OBSERVATION WINDOW WITH FLANGE FOR OPTICAL MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To solve the problem of having conventionally no technology to constitute airtight structure by a method without using a thermal process causing strain of a window or a process of press-fitting by pressing, when joining the window with a flange or bringing these members into close contact with each other. SOLUTION: A ring of metallic flexible structure is arranged between an outer peripheral side surface part of the window and an inner peripheral side surface part of the flange. The ring is extended in the horizontal direction by compressing this ring by a push plate fastenable to the flange by a screw. After respectively contacting the inner peripheral side and the outer peripheral side of the ring with the outer peripheral side surface part of the window and the inner peripheral side surface part of the flange, electroless plating of a low temperature bath is applied to its contacted part, and air-tightness is provided by its plating layer. COPYRIGHT: (C)2006,JPO&NCIPI