METHOD FOR MEASURING DENSITY OF THIN LAYER AND LOSS MASS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To precisely measure the change of mass and the change of density caused by the loss of the constituent molecule or atom of an irradiation layer. SOLUTION: The thickness of the irradiation layer of a substance irradiated with radiation and the energy of a positive electron necessary for passing through the irradiation layer while the calculated thickness of the irradiation layer is substituted for z(Ep) of the formula:ρ=AEpn/z(Ep) and the calculated energy of the positive electron is substituted for Epof the formula to calculateρof the formula. The calculatedρof the formula is set to the density of the irradiation layer. COPYRIGHT: (C)2006,JPO&NCIPI