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经营范围
发明名称
WET ETCHING METHOD
摘要
申请公布号
KR20050113042(A)
申请公布日期
2005.12.01
申请号
KR20040038531
申请日期
2004.05.28
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, CHANG SOO;KANG, TAE WOOK;JEONG, CHANG YONG
分类号
H01L21/3063;(IPC1-7):H01L21/306
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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