Fluid ejection device with a through-chip micro-electromechanical actuator

摘要

A fluid ejection device includes a substrate that defines a plurality of nozzle chambers. A drive circuitry layer is positioned on one side of the substrate and contains drive circuitry. A structural layer is positioned on an opposite side of the substrate and defines a plurality of ink ejection ports in fluid communication with respective nozzle chambers. A plurality of micro-electromechanical actuators is fast at one end with the substrate and extends into respective nozzle chambers. Each actuator comprises an actuating member that is connected to the drive circuitry and anchored at one end to the substrate. Each actuating member is displaceable between a quiescent position and an active position to eject fluid from the respective ejection ports.