METHOD AND DEVICE FOR PRECISELY RESISTING AND MOVING HIGH LOAD

摘要

A method and a device for precisely resisting and moving a high load capable of accurately moving a mobile body in the vertical direction even when a pressing force is applied onto a large sliding surface by combining piezo elements causing shear deformation with a wedge or the piezo elements causing the shear deformation and piezo elements causing vertical deformation with the wedge. The piezo elements causing the shear deformation are stacked on each other so that their shearing directions are different from each other and combined with the wedge so that the mobile body can be accurately moved in the vertical direction even when the pressing force is applied to the large sliding surface. The device comprises a wedge-like moving element (23) disposed on the horizontal surface of a fixed body and to which the piezo elements (24A) causing the shear deformation are fixed, a pulse source (30) rapidly deformably driving the piezo elements (24A), and the mobile body (25) vertically moving in contact with the vertical wall surface (22) of the fixed body by the driving of the wedge-like moving element (23). The mobile body (25) can be moved and positioned by driving and extracting the wedge-like moving element (23) in and from the mobile body (25).