MICROMACHINED ELECTROCHEMICAL (MEM) RANDOM ACCESS MEMORY ARRAY AND METHOD OF MAKING SAME

摘要

A micromachined electromechanical random access memory (MEMRAM) array is disclosed which includes a plurality of MEM memory cells, where each MEM memory cell has an MEM switch and a capacitor. The MEM switch includes a contact portion configured for moving from a first position to a second position for reading out a charge stored within the capacitor or for writing the charge to the capacitor. A method is also disclosed for fabricating each MEM memory cell of the MEMRAM array.