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发明名称
WAFER TEST EQUIPMENT AND ALIGNMENT METHOD OF THE EQUIPMENT
摘要
申请公布号
KR20050112889(A)
申请公布日期
2005.12.01
申请号
KR20040038326
申请日期
2004.05.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG NAM;KIM, YOUNG JONG
分类号
G01R31/02;G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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