发明名称 PIXEL OF A THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD FOR MAKING THE SAME
摘要 A pixel of a thin film transistor array substrate and a method for making the same are used to reduce exposure time and prevent the pixel from being exposed to light beams with uneven light intensity in a photolithography process, where the light beams with uneven light intensity resulting from protrusions of a stage in an exposure apparatus may result in forming undesired patterns in the pixel. The pixel includes a light-shielding layer formed below a photosensitive layer to shelter portions of the pixel from the light beams in order to prevent the light beams from irradiating the protrusions of the stage. Additionally, the light-shielding layer comprising a multi-layer reflective film or a metallic material with high reflectivity functions to reflect the light beams to irradiate the photosensitive layer again, thereby reducing the exposure time required by the photolithography process.
申请公布号 US2005263766(A1) 申请公布日期 2005.12.01
申请号 US20040709766 申请日期 2004.05.27
申请人 LIU HONG-DA 发明人 LIU HONG-DA
分类号 G02F1/1335;G02F1/1362;H01L27/12;H01L27/146;H01L29/04;(IPC1-7):H01L29/04 主分类号 G02F1/1335
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