发明名称 MANUFACTURING METHOD OF COMPOSITE SHEET MATERIAL USING ULTRA-FAST LASER PULSES
摘要 A patterned, multi-layered thin film structure is patterned using ultra-fast lasers and absorption spectroscopy without damaging underlying layers of the layered structure. The structure is made by selecting ablatable layers based on their thermal, strength and absorption spectra and by using an ultra-fast laser programmed with the appropriate wavelength (lambda), pulse width (tau ), spectral width (Deltalambda ), spot size, bite size and fluence. The end structure may have features (such as vias, insulating areas, or inkjet printed areas) patterned in the last (top) layer applied or at deeper layers within the layered structure, and can be used as components of organic light emitting didoes (OLEDs) and organic thin film transistors (OTFTs). The method of the present invention includes determining the product's specifications, providing a substrate, selecting a layer, applying the layer, patterning the layer and determining if more layers need to be added to the multi-layered thin film structure.
申请公布号 WO2005114739(A2) 申请公布日期 2005.12.01
申请号 WO2005US16359 申请日期 2005.05.10
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD;CHENG, CHEN-HSIUNG;LIU, XINBING;SOGAMI, ATSUSHI;NISHIMURA, KAZUO 发明人 CHENG, CHEN-HSIUNG;LIU, XINBING;SOGAMI, ATSUSHI;NISHIMURA, KAZUO
分类号 H01L21/26;H01L21/324;H01L21/42;H01L21/477;H01L29/06;H01L31/0328;H01L31/0336;H01L31/072;H01L31/109;H01L51/00;H01L51/56 主分类号 H01L21/26
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