发明名称 |
SUPERFEINES WOLFRAMTEILCHEN UND VERFAHREN ZU DESSEN HERSTELLUNG |
摘要 |
A particle of W oxide 2 such as a particle of WO3 is disposed on an amorphous carbon support film 1, onto the particle of W oxide 2 in an atmosphere of high vacuum an electron beam of an intensity of 10<23> to 10<24> e/cm<2>.sec being irradiated. Due to the irradiation of an electron beam 3 of such an intensity, ultra fine particles of W 4 of a particle diameter of for instance 10 nm or less are generated. The ultra fine particles of W consist of W effected to detach from the particle of W oxide. <IMAGE> |
申请公布号 |
DE69928017(D1) |
申请公布日期 |
2005.12.01 |
申请号 |
DE1999628017 |
申请日期 |
1999.03.19 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY, KAWAGUCHI;KABUSHIKI KAISHA TOSHIBA, KAWASAKI |
发明人 |
TAMOU, YOSHITAKA;TANAKA, SHUN-ICHIRO;XU, BINGSHE |
分类号 |
C22F3/00;B22F1/00;B22F9/02;B22F9/30;C23C14/22;C23C14/30;C23C24/00;(IPC1-7):C23C14/30;B22F9/20 |
主分类号 |
C22F3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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