发明名称 |
Imprinting method, information recording medium-manufacturing method, and imprinting apparatus |
摘要 |
An imprinting method which is capable of forming a concave/convex pattern in a short time without causing deformation or incompleteness of the pattern. In the imprinting method, a stamper-pressing step of pressing a stamper against a resin layer formed by applying a resin material to a surface of a substrate, in a state of the resin layer being heated to a predetermined temperature, and a stamper-removing step of removing the stamper from the resin layer while maintaining either of the state of the resin layer being heated and a state of the temperature of the heated resin layer being held, are performed in the mentioned order, whereby shapes of recesses/protrusions of the stamper are transferred to the resin layer to form a concave/convex pattern on the substrate.
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申请公布号 |
US2005263915(A1) |
申请公布日期 |
2005.12.01 |
申请号 |
US20050087608 |
申请日期 |
2005.03.24 |
申请人 |
TDK CORPORATION |
发明人 |
FUJITA MINORU;HATTORI KAZUHIRO;SOENO YOSHIKAZU;TAKAI MITSURU |
分类号 |
G11B5/84;B29C43/02;B29D17/00;G03F7/00;G11B5/855;G11B7/26;H01L21/027;(IPC1-7):B29D17/00 |
主分类号 |
G11B5/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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