发明名称 |
CAPACITANCE SENSING FOR SUBSTRATE COOLING |
摘要 |
<p>Described is a cooling system for use in the manufacture of substrates into magnetic disk memory in which cooling plates are positioned dynamically in relation to a substrate to be cooled. This enables positioning the cooling plates closer for more effective cooling. Positioning is controlled by capacitive measurements between the cooling plates and the substrate to be cooled.</p> |
申请公布号 |
WO2005114074(A1) |
申请公布日期 |
2005.12.01 |
申请号 |
WO2005US15661 |
申请日期 |
2005.05.06 |
申请人 |
INTEVAC, INC. |
发明人 |
ROGERS, JAMES, H.;HOFFMAN, BRIAN |
分类号 |
F25D23/12;G11B5/84;H01L21/00;(IPC1-7):F25D23/12 |
主分类号 |
F25D23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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