| 发明名称 |
Electronic device manufacturing apparatus |
| 摘要 |
An electronic device manufacturing apparatus is provided with a support which includes a shelf for supporting a substrate, a sensor which obtains the position of the substrate and a position correcting mechanism which corrects the position of the substrate. Or alternatively, an electronic device manufacturing apparatus is provided with a support which includes a shelf for supporting a substrate and the shelf includes a substrate support plane which forms an angle of 22° or more to 90° or less with a horizontal plane.
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| 申请公布号 |
US2005266649(A1) |
申请公布日期 |
2005.12.01 |
| 申请号 |
US20050097140 |
申请日期 |
2005.04.04 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
NIWAYAMA MASAHIKO;YONEDA KENJI;TAKAHASHI KAZUMA |
| 分类号 |
H01L21/683;H01L21/00;H01L21/26;H01L21/68;H01L21/687;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
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