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发明名称
Elektromagnetisch-akustischer Wandler und EMAR-System
摘要
申请公布号
DE69635339(D1)
申请公布日期
2005.12.01
申请号
DE19966035339
申请日期
1996.12.13
申请人
EBARA CORP., TOKIO/TOKYO
发明人
OHTANI, TOSHIHIRO;OGI, HIROTSUGU;HIRAO, MASAHIKO
分类号
B06B1/04;G01N29/11;G01N29/24;G01N29/44;G06F3/06;(IPC1-7):G01N29/24
主分类号
B06B1/04
代理机构
代理人
主权项
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