发明名称 Radiation curable composition, storing method thereof, forming method of cured film, patterning method, use of pattern, electronic components and optical waveguide
摘要 The present invention provides a radiation curing composition comprising (a): a siloxane resin, (b): a photoacid generator or photobase generator, and (c): a solvent capable of dissolving component (a), and (d): a curing acceleration catalyst.
申请公布号 US2005266344(A1) 申请公布日期 2005.12.01
申请号 US20050166415 申请日期 2005.06.27
申请人 HITACHI CHEMICAL CO., LTD. 发明人 SAKURAI HARUAKI;ABE KOICHI
分类号 G03C1/492;G03F7/004;G03F7/075;G03F7/38;(IPC1-7):G03C1/492 主分类号 G03C1/492
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