| 摘要 |
The inventive interferometer device for measuring a transparent layer (2) is provided with an optical head (26) and comprises a rotatable unit (30) having a first mirror (34) whose surface is flat of quasiflat and a second mirror (38) deviating an incident beam (28) in a direction of the layer (2), wherein said incident beam propagates in a substentially horizontal manner between two mirrors. The beam projected on the layer moving at a certain speed (v) is displaced substantially in a straight direction in such a way that it is possible to accurately measure the thickness of the layer which move at a relatively high speed and whose measuring area is quasi invariable during measurement. |
