发明名称 Integrated via resistor
摘要 A method of forming a resistor in an integrated circuit, comprising etching a first via in a first layer of dielectric material, depositing a layer of metal adjacent the first layer of dielectric material, depositing a second layer of dielectric material adjacent the layer of metal, and etching a second via in the second layer of dielectric material, said second via electrically connected in series to the first via by way of the layer of metal to form said resistor.
申请公布号 US2005266651(A1) 申请公布日期 2005.12.01
申请号 US20040857671 申请日期 2004.05.28
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 TAYLOR RICHARD F.;CRAMER HANS T.
分类号 H01L21/02;H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/02
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