发明名称 |
Modeling resolution enhancement processes in integrated circuit fabrication |
摘要 |
A Wafer Image Modeling and Prediction System ("WIMAPS") is described that includes systems and methods that generate and/or apply models of resolution enhancement techniques ("RET") and printing processes in integrated circuit ("IC") fabrication. The WIMAPS provides efficient processes for use by designers in predicting the RET and wafer printing process so as to allow designers to filter predict printed silicon contours prior to application of RET and printing processes to the circuit design
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申请公布号 |
US2005268256(A1) |
申请公布日期 |
2005.12.01 |
申请号 |
US20050096469 |
申请日期 |
2005.04.01 |
申请人 |
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发明人 |
TSAI CHI-MING;MAN LAI-CHEE;WANG YAO-TING;CHANG FANG-CHENG |
分类号 |
G03F1/00;G03F1/14;G03F1/36;G06F9/45;G06F17/50;(IPC1-7):G06F17/50 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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