| 摘要 |
AN ARRAY (10) OF PHOTOSENSITIVE DEVICE NAY BE FORMED WITH IMPROVED FILL FACTORS BY INCLUDING A DIFFRACTIVE MICROLENS (14) WHICH MAY HAVE ASTEPPED CONFIGURATION. THE MICROLENS (14) MAY BE FORMED OF A SOL-GEL MATRIAL (26) HAVING A PHOTOINITOR, OR OTHER MATERIALS THAT MAY BE DEFINED WITH LOW TEMPERATURE TECHNIQUES COMMONLY USED IN CONNECTIU0N WITH PHOTORESISTS. IN PARTICULAR, A GRAY SCALE MASK (24) MAY BE USED TO DEFINE A PLURALITY OF STEPS (22) IN THE RESULTING MICROLENS (14) WHICH HAE DIFFERENT DIFFRACTIVE CHARACTERISTICS. |
