发明名称 HEAT TREATMENT FURNACE
摘要 IT IS AN OBJECT OF THE PRESENT INVENTION TO PROVIDE A HEAT TREATMENT FURNACE IN WHICH THE REPRODUCTION PROPERTIES OF TEMPERATURE DETECTION VALUES CAN BE GREATLY IMPROVED COMPARED WITH A CONVENTIONAL HEAT TREATMENT FURNACE IN THE CASE WHERE THE TEMPERATURE SENSORS ARE ATTACHED AGAIN TO THE FURNACE AFTER MAINTENANCE AND INSPECTION. THE HEAT TREATMENT FURNACE INCLUDES ROD-SHAPED TEMPERATURE SENSORS (8A TO 8C) FOR DETECTING THE ATHMOSPHERIC TEMPERATURE IN THE FURNACE (1), WHEREIN THE TEMPERATURE SENSORS (8A TO 8C) ARE INSERTED INTO THE FURNACE FROM THE OUTSIDE OF A FURNACE WALL (2), AND THE TEMPERATURE SENSORS (8A TO 8C) ARE DIAGONALLY INSERTED WITH RESPECT TO THE WIDTH DIRECTION OF A PERIPHERAL WALL OF THE FURNACE.(FIG. 1)
申请公布号 MY120655(A) 申请公布日期 2005.11.30
申请号 MYPI9400792 申请日期 1994.04.04
申请人 SHINKO ELECTRIC CO., LTD 发明人 MITSUHIRO HAYASHI;HITOSHI KAWANO;HIROSHI NAGASHIMA
分类号 F27D21/00;H01L21/22;H01L21/324 主分类号 F27D21/00
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