Electrostatic suction driving apparatus

摘要

A plurality of stator-side electrodes disposed in a stator is vertically disposed so as to face a plurality of mover-side electrodes disposed on a mover in a protruding manner. Wide areas facing each other can be secured between the electrodes on the stator and the mover-side electrodes even at a narrow space in three dimensions. Great electrostatic suction force can be generated between both electrodes, and the mover 30 can be driven with greater driving force. <IMAGE>