MANUFACTURE METHOD OF DIFFRECTIVE THIN-FILM PIEZOELECTRIC MICRO-MIRROR AND MANUFACTURING METHOD THEREOF,申请号KR20040091018-传众专利搜索

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发明名称	MANUFACTURE METHOD OF DIFFRECTIVE THIN-FILM PIEZOELECTRIC MICRO-MIRROR AND MANUFACTURING METHOD THEREOF
摘要
申请公布号	KR20050112494(A)	申请公布日期	2005.11.30
申请号	KR20040091018	申请日期	2004.11.09
申请人	SAMSUNG ELECTRO-MECHANICS CO., LTD.	发明人	AN, SEUNG DO;YUN, SANG KYEONG;SONG, JONG HYEONG
分类号	G02B6/26;G02B26/00;G02B26/08;(IPC1-7):G02B26/00	主分类号	G02B6/26
代理机构		代理人
主权项
地址

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