CRITICAL DIMENSION VARIATION COMPENSATION ACROSS A WAFER BY MEANS OF LOCAL WAFER TEMPERATURE CONTROL,申请号EP20040710651-传众专利搜索

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发明名称	CRITICAL DIMENSION VARIATION COMPENSATION ACROSS A WAFER BY MEANS OF LOCAL WAFER TEMPERATURE CONTROL
摘要
申请公布号	EP1599891(A2)	申请公布日期	2005.11.30
申请号	EP20040710651	申请日期	2004.02.12
申请人	LAM RESEARCH CORPORATION	发明人	STEGER, ROBERT, J.
分类号	F27B5/14;F27B17/00;F27D19/00;F27D21/00;F27D99/00;H01J37/32;H01L;H01L21/00;H01L21/306;(IPC1-7):H01J37/32	主分类号	F27B5/14
代理机构		代理人
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地址

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