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发明名称
METHOD AND APPARATUS FOR FABRICATING NANOSCALE STRUCTURES
摘要
申请公布号
EP1599413(A2)
申请公布日期
2005.11.30
申请号
EP20040715950
申请日期
2004.03.01
申请人
UNIVERSITY OF SURREY
发明人
COX, DAVID, CHRISTOPHER;FORREST, ROY, DUNCAN;SILVA, SEMBUKUTIARACHILAGE, RAVI
分类号
B82B3/00;B81C99/00;H01J9/02;H01L21/768;H01L51/00;H01L51/30;H01L51/40;(IPC1-7):B82B3/00
主分类号
B82B3/00
代理机构
代理人
主权项
地址
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