METHOD FOR SUPPLYING CHEMICAL, APPARATUS FOR PERFORMING THE SAME AND APPARATUS FOR PROCESSING A WAFER HAVING THE CHEMICAL SUPPLYING APPARATUS,申请号KR20040037411-传众专利搜索

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发明名称	METHOD FOR SUPPLYING CHEMICAL, APPARATUS FOR PERFORMING THE SAME AND APPARATUS FOR PROCESSING A WAFER HAVING THE CHEMICAL SUPPLYING APPARATUS
摘要
申请公布号	KR20050112359(A)	申请公布日期	2005.11.30
申请号	KR20040037411	申请日期	2004.05.25
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, KUEN BYUL;HONG, JIN SUK;JUN, YONG MYUNG;LEE, KANG YOUN;KO, HYUN JIN;KIM, KYOUNG HWAN
分类号	H01L21/02;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
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