Displacement detection apparatus and displacement detection method

摘要

Improving reducing or eliminating the effects of variation in characteristics of the resonance circuit in a resonance type displacement detection apparatus, so as to improve displacement detection accuracy. In a displacement detection system 10, the resonance frequency range assumable by the resonance circuit 21 is estimated in advance, there is determined a drive frequency variation range f1 -f2 such that the estimated resonance frequency range is included therein, and by means of a variable oscillator 30, drive frequency is repeatedly varied between the first frequency f1 and the second frequency f2. Accordingly, where the resonance frequency of the resonance circuit 21 is fr1, when the drive frequency has changed to fr1, resonance voltage Vgl1 may be obtained in the case of large gap G. Where the resonance frequency of the resonance circuit 21 is fr2, when the drive frequency has changed to fr2, resonance voltage Vgl2 may be obtained in the case of large gap G.