MICROMACHINED GYROS

摘要

A micromachined device has a first body suspended over a substrate in a plane parallel to the substrate and movable in the plane in a first direction relative to the substrate. A driver moves the first body in the first direction. A stop member, anchored to the substrate, limits motion of the body in the plane in a direction perpendicular to the first direction, and in a direction orthogonal to the plane and away from the substrate.