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发明名称
METHOD FOR FABRICATING CAPACITOR USING MPS PROCESS
摘要
申请公布号
KR100531461(B1)
申请公布日期
2005.11.28
申请号
KR20030043283
申请日期
2003.06.30
申请人
发明人
分类号
H01L27/04;H01L21/02;H01L21/20;H01L21/8242;H01L27/108;(IPC1-7):H01L27/04
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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