Apparatus for detecting plasma anomalous discharge,申请号KR20017014922-传众专利搜索

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发明名称	Apparatus for detecting plasma anomalous discharge
摘要
申请公布号	KR100530688(B1)	申请公布日期	2005.11.28
申请号	KR20017014922	申请日期	2001.11.22
申请人		发明人
分类号	H05H1/00;(IPC1-7):H05H1/00	主分类号	H05H1/00
代理机构		代理人
主权项
地址

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