| 摘要 |
A fine pattern of an optical device formed by the Photo-Polymer method has a groove 100, a side wall 100 a of which is sloped against a surface of stamper 18. The slope angle theta of the side wall 100 a satisfies the following relational expression: Tan<SUP>-1</SUP>(4xhxw<SUB>1</SUB><SUP>-0.2</SUP>)<theta<80° where h: a depth of the groove 100; and w<SUB>1</SUB>: a width of a top of a projected portion formed by the side walls 100 a. Burrs formed in the optical device are reduced, and thereby mass productivity of the optical device is improved. |
