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发明名称
ARTICLE COMPRISING AN OXIDE LAYER ON GaN, AND METHOD OF MAKING THE ARTICLE
摘要
申请公布号
KR100516252(B1)
申请公布日期
2005.11.25
申请号
KR19980042256
申请日期
1998.10.09
申请人
发明人
分类号
H01L21/34;(IPC1-7):H01L21/34
主分类号
H01L21/34
代理机构
代理人
主权项
地址
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