Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source

摘要

An ultraviolet light source ( 1 ) comprises a laser light source ( 10 ) for generating a signal light in the infrared region, a optical amplifier ( 20 ) which comprises fiber optical amplifiers ( 21, 22 ) and amplifies the signal light generated by the laser light source ( 10 ), and a wavelength converting optical system ( 30 ) which coverts the signal light amplified by the light amplifier ( 20 ) into an ultraviolet light and outputs the converted light. The ultraviolet light source ( 1 ) uses a single-mode fiber laser ( 26 ) as an excitation light source for at least the fiber optical amplifier ( 22 ) at one stage of the optical amplifier ( 20 ).